Pyrometer CellaWafer PA 38

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The CellaWafer PA 38 is a digital pyrometer for measuring temperature of wafers from 450 to 1,800 °C. Due to its very short-wave and narrow-band measuring wavelength, this pyrometer is particularly suitable for measurements on silicon wafers in applications like RTP (rapid thermal processing) and metals (tungsten, molybdenum,..). Furthermore, it reacts insensitively to changes in the emissivity of the measuring object.

Special features:

Measuring range 450 to 1800 °C
focusable interchangeable lenses for exact adjustment of the measuring distance
broadband anti-reflective precision lenses
short-wave and narrow-band spectral range
particularly suitable for precise measurements on metals and on silicon wafers
LED display can be read from a great distance
test current output for the diagnostic function
standard feature: analogue output and USB/RS 485 interface

Pyrometer CellaWafer PA 38

Measuring range		450 - 1800 °C 450 - 1800 °C
Focus distance		0,3 m - ∞ 0,3 m - ∞
Sighting option		Through-the-lens-sighting Through-the-lens-sighting Laser pilot light Video camera

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Version		AF 10
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Measuring range	450 - 1800 °C
Sensor	Photo diode
Spectral range	0,88 µm
Response time t98	≤ 50 ms (T > 650 °C) ≤ 2 ms (T > 850 °C)
Measurement uncertainty	0.3 % of temp. reading [°C], min. 4 K
Repeatability	1 K
Temperature coefficient	0.05 %/K
Resolution current output	0.2 K + 0.03 % of selected range
Resolution interface	0.1 K
Resolution display	1 K

Analog output	0(4) - 20 mA linear, switchable, scalable
Resistance	≤ 500 Ω
Analog input	0 - 10 V
Switching output	2 x Open Collector 24 V DC, ≤ 30 mA
Switching input	2 x to 24 V
Interface	USB
Interface	RS 485
Power supply	24 V DC +10 % / -20 %
Current consumption	≤ 175 mA for 24 V DC

Sighting option	Through-the-lens-sighting
Sighting option	Laser pilot light
Sighting option	Camera
Display	4-digit LED display red, digit-height 8 mm
Status display	2 x LED
Control elements	3 buttons

Connection	M12 thread 8-pin connection
Ambient temperature	0 - 65 °C
Storage temperature	-20 - +80 °C
Permissible humidity	95 % r.H. max. (non-condensing)
Dimension	Ø 65 mm x 220 mm (max. 277 mm)
Housing	Stainless steel V2A (1.4305)
Protection class	IP 65 acc. to DIN 40050
Weight	approx. 0.9 kg

Overtemperature signal	if the internal temperature exceeds 80 °C the analogue output shows a value > 20.5 mA
Service function	Simulation of a measured value or a current signal
ATD-(Automatic Temperature Detection) function	Automatic temperature detection at discontinuous processes

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Pyrometer CellaWafer PA 38

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Version	CellaWafer PA 38 AF 10
Measuring range	450 - 1800 °C
Focus distance	0,3 m - ∞
Shape of the measuring field	round
Distance ratio	40 : 1
Objective	PA 20.08
Measuring principle	one-colour
Sighting option	Through-the-lens-sighting
Sighting option	Laser pilot light
Sighting option	Video camera

Measuring distance	Measuring field diameter
0.00 mm	24.40 mm
12.00 mm	23.62 mm
24.00 mm	22.85 mm
36.00 mm	22.07 mm
48.00 mm	21.30 mm
60.00 mm	20.52 mm
72.00 mm	19.74 mm
84.00 mm	18.97 mm
96.00 mm	18.19 mm
108.00 mm	17.42 mm
120.00 mm	16.64 mm
132.00 mm	15.86 mm
144.00 mm	15.09 mm
156.00 mm	14.31 mm
168.00 mm	13.54 mm
180.00 mm	12.76 mm
192.00 mm	11.98 mm
204.00 mm	11.21 mm
216.00 mm	10.43 mm
228.00 mm	9.66 mm
240.00 mm	8.88 mm
252.00 mm	8.10 mm
264.00 mm	7.33 mm
276.00 mm	6.55 mm
288.00 mm	5.78 mm
300.00 mm	5.00 mm

Pyrometer CellaWafer PA 38

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