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산업 솔루션 안내서 - 크리스탈 성장 - SiC(탄화규소)

장점:
  • Special pyrometer calibration for silicon carbide (SiC)
  • established solution for temperature measurement in SiC crystal growth using physical vapour transport (PVT)
  • narrow field of view allows measurement through small openings in insulation
  • exact alignment by means of integrated through-the-lens sighting, video camera or laser spot light

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