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산업 솔루션 안내서 - 반도체 생산 - PLD(펄스 레이저 증착)
장점:
레이저 증발(PLD) 중 타겟 또는 기판의 온도 측정
통합 차단 필터로 레이저 및 플라즈마 방사선에 민감하지 않음
고해상도 광학으로 가능한 가장 작은 물체 측정
통합 비디오 카메라 또는 렌즈 투시창으로 정확한 정렬 가능
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