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  Customer data
  
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Phone  
E-mail*  
  
Industry
In which industrial sector should the pyrometer be used?  
  
Application
Description of the measurement

If possible, send some pictures or drawings to
its@keller.de
or per fax to
+49 (0) 5451 85412
  
  
Type of coating
  

  
Measuring task
What temperature do you want to measure?  

  
Target (Deposition material)
Nature  



Material  
Is there a physical process of vaporisation?  

Other physical evaporation  
Temperature range of the target (from/to in °C)  
Size of the target in mm  
  
Substrate
Material  
Temperature in °C  
Thickness in mm  
  
Holder
Material  
Is it cool down?     
Temperature in °C  
  
Heating source
  




Other heating source  
If laser, please specify wavelength  
If plasma, please specify type of gases  
Distance between pyrometer and measured object in mm  
Is the measured object moving?     
If yes, please specify speed  
Is the measured object permanently present?     
What measurement technique is employed up to now?  


Other measurement technique  
  
Ambient conditions
Ambient temperature in °C  
Pressure inside the chamber in Pa  
Is the object visible through a window?     
Diameter of sighting window (free opening) in mm (free opening)  
Material of sighting window  
  
Specification of the instrument
Type of pyrometer  

Sighting device  



Output signal  

Digital interface  



Other digital interface  
  
Signal processing
Should the measured values be recorded?     
Is a central data recording existing?     
Additional details or description  




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Questionnaire for temperature measurement in CVD/PVD coating processes

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